System and method for cleaning surface of substrate using roll-to-roll plasma generating device
OwnerChang Hoon LEEinventor
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OwnerChang Hoon LEEinventor
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A roll-to-roll surface cleaning treatment system may include an upper housing containing a first plasma generating device and a first transfer roller that faces a nozzle from which a plasma beam generated by the first plasma generating device is discharged and that winds and transfers a flexible substrate, the upper housing comprising a gas inlet, an entrance through which the flexible substrate is introduced, and an outlet through which the flexible substrate is discharged, and a lower housing connected to the entrance of the upper housing and containing a second plasma generating device and a second transfer roller that faces a nozzle from which a plasma beam generated by the second plasma generating device is discharged and that winds and transfers the flexible substrate, the lower housing comprising a gas outlet, and an inlet through which the flexible substrate is introduced.
A roll-to-roll plasma surface cleaning treatment system, comprising:
A roll-to-roll plasma surface cleaning treatment method, comprising:
Dependencies are inferred from the claim text.