Back to results
US 2022/0020558 A1Published application
Ion Milling Apparatus and Method of Manufacturing Sample
AssigneeJEOL Ltd.
InventorsShogo Kataoka, Tatsuro Mino, Koji Todoroki
Life of this patent
Estimating the term…
Abstract
An ion milling apparatus includes a pair of shielding members sandwiching a sample, and an ion source configured to irradiate the sample with an ion beam. The ion milling apparatus is configured to be capable of irradiating the sample with the ion beam in a first mode of irradiating the sample with the ion beam via one shielding member and in a second mode of irradiating the sample with the ion beam via the other shielding member.
Claims10
An ion milling apparatus comprising:
- a pair of shielding members sandwiching a sample;
- and
- an ion source configured to irradiate the sample with an ion beam, wherein
- the ion milling apparatus is configured to be capable of irradiating the sample with the ion beam in a first mode of irradiating the sample with the ion beam via one shielding member of the pair of shielding members and in a second mode of irradiating the sample with the ion beam via the other shielding member.
1 more element
A method of manufacturing a sample comprising:
- a first processing step of sandwiching a sample by a pair of shielding members and irradiating the sample with an ion beam via one shielding member;
- and
- a second processing step of irradiating the sample with the ion beam via the other shielding member.
Dependencies are inferred from the claim text.