Multimodal inspection system
AssigneeBattelle Memorial Institute
InventorsAnthony George, Thomas Kent, Blaine Miller, Katie Liszewski, Russell Gilabert, Timothy McDonley
Life of this patent
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Abstract
A multimodal inspection system (MIS) is disclosed herein. The MIS may use one or more modalities to inspect a sample. Some of the modalities include, but are not limited to, Raman, visible (VIS), terahertz (THz) spectroscopy, longwave infrared (LWIR), shortwave infrared (SWIR), laser profilometry (LP), electromagnetic interference (EMI) near field probing, and/or, Millimeter Wave (MMW) radar.
Claims20
A method comprising:
- capturing data from a plurality of sensors over a period of time to generate a set of captured data for each sensor of the plurality of sensors;
- capturing location information for each sensor of the plurality of sensors;
- performing spatial correlation on each set of captured data using in part the location information;
- analyzing the spatially correlated data for an anomaly;
- and
- generating a report regarding the anomaly based on the analyzed data.
A system comprising:
- a plurality of sensors configured to capture data over a period of time to generate a set of captured data for each sensor of the plurality of sensors;
- a stage positioned with location information that is captured information for each sensor of the plurality of sensors;
- a processor for performing spatial correlation on each set of captured data using in part the location information and analyzing the spatially correlated data for an anomaly;
- and
- an output device for generating and outputting a report regarding the anomaly based on the analyzed data.
A memory configured to store instructions, and a processor operatively coupled to the memory configured to execute the instructions to perform the method comprising:
- capturing data from a plurality of sensors over a period of time to generate a set of captured data for each sensor of the plurality of sensors;
- capturing location information for each sensor of the plurality of sensors;
- performing spatial correlation on each set of captured data using in part the location information;
- analyzing the spatially correlated data for an anomaly;
- and
- generating a report regarding the anomaly based on the analyzed data.
Dependencies are inferred from the claim text.