Method and device for processing semiconductor manufacturing information

Abstract

A method and a device for processing semiconductor manufacturing information and a semiconductor manufacturing information processing device are involved. The method for processing semiconductor manufacturing information includes that: acquiring manufacturing information through a Manufacturing Execution System (MES), and the manufacturing information is provided by the MES for a Statistical Process Control (SPC) system to generate check information; detecting whether the manufacturing information is matched with the check information, and in response to the manufacturing information being unmatched with the check information, outputting alerting information. According to the provided method for processing semiconductor manufacturing information, a condition that the manufacturing information is lost and not monitored may be reduced, and a process control risk may be prevented.

Dependencies are inferred from the claim text.