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US 2022/0019150 A1Published application
Sealing device, component and lithography apparatus
AssigneeCarl Zeiss SMT GmbH
InventorsDieter Bader, Alexander Ostendorf, Ole Fluegge
Life of this patent
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Abstract
A sealing device seals a first component part of a lithography apparatus vis-à-vis a multiplicity of second component parts of the lithography apparatus. The sealing device includes a multiplicity of sealing rings and a multiplicity of connection locations. The sealing rings are connected to one another with the aid of the connection locations.
Claims20
A device, comprising:
- a multiplicity of connection locations;
- and
- a multiplicity of sealing rings integrally connected to one another via the connection locations,
- wherein the device is configured to seal a first component part of a lithography apparatus with a multiplicity of second component parts of the lithography apparatus.
1 more element
A component, comprising:
- a first component part;
- a multiplicity of second component parts disposed in sections of the first component part;
- and
- a device, comprising:
- a multiplicity of connection locations;
- and
- a multiplicity of sealing rings integrally connected to one another via the connection locations,
- wherein the device is configured to configured to seal the first component part with the multiplicity of second component parts, and the component is a lithography component.
5 more elements
Dependencies are inferred from the claim text.