Reflection-Reducing Layer System and Method for Producing A Reflection-Reducing Layer System
OwnerUlrike Schulz, Friedrich Rickelt +4inventors
InventorsUlrike Schulz, Friedrich Rickelt, Peter Munzert, Anne Gärtner, Nancy Gratzke, Kevin Füchsel
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Abstract
In an embodiment a layer system includes an effective refractive index profile extending between a substrate-side surface and an interface with an ambient medium, wherein an effective refractive index of the layer system decreases on average from the substrate-side surface in a direction of the interface with the ambient medium, wherein the effective refractive index profile has at least two local minima, and wherein a local minimum closest to the interface with the ambient medium is spaced from the interface.
Claims16
A layer system comprising:
- an effective refractive index profile extending between a substrate-side surface and an interface with an ambient medium,
- wherein an effective refractive index of the layer system decreases on average from the substrate-side surface in a direction of the interface with the ambient medium,
- wherein the effective refractive index profile has at least two local minima, and
- wherein a local minimum closest to the interface with the ambient medium is spaced from the interface.
A method for manufacturing a layer system, the method comprising:
- providing a substrate;
- depositing an organic layer on an inorganic layer;
- forming a structuring of the organic layer by a plasma etching process, wherein an elevation of the structuring has a height-to-width ratio of at least 1.0, and wherein a chemical composition of an organic material of the organic layer changes;
- depositing at least one further inorganic layer;
- performing a post-treatment in which the chemical composition of the organic material of the organic layer changes and a refractive index decreases;
- and
- depositing an inorganic cover layer.
Dependencies are inferred from the claim text.