Inspection apparatus and control method for inspection apparatus
AssigneeTokyo Electron Limited
InventorHiroyuki NAKAYAMA
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Abstract
An inspection apparatus includes a stage on which a substrate having an inspection target is placed, a probe card, a light irradiator, and a controller. The probe card has probes that supply a current to the inspection target. The light irradiator irradiates light to heat the substrate. The controller controls the light irradiator to excecute uniformly heating the inspection target by the light from the light irradiator, and heating an outer peripheral portion of the inspection target by the light from the light irradiator.
Claims11
An inspection apparatus comprising:
- a stage on which a substrate having an inspection target is placed;
- a probe card having probes that supply a current to the inspection target;
- a light irradiator to irradiate light to heat the substrate;
- and
- a controller to control the light irradiator configured to:
- uniformly heat the inspection target by the light from the light irradiator, and
- heat an outer peripheral portion of the inspection target by the light from the light irradiator.
A control method of an inspection apparatus including a stage on which a substrate having an inspection target is placed, a probe card having probes that supply a current to the inspection target object, a light irradiator to irradiate light to heat the substrate, and a controller to control the light irradiator, the control method, which is executed by the controller, comprising:
- uniformly heating the inspection target by the light from the light irradiator, and
- heating an outer peripheral portion of the inspection target by the light from the light irradiator.
Dependencies are inferred from the claim text.