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US 2022/0018802 A1Published application
pH MEASURING DEVICE AND pH MEASURING METHOD
AssigneeTokyo Electron Limited
InventorToshiyuki Shiokawa
Life of this patent
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Abstract
A pH measuring device configured to measure a pH of a target liquid includes a main body block including a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line. The main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with the target liquid within the cavity.
Claims8
A pH measuring device configured to measure a pH of a target liquid, comprising:
- a main body block comprising a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line,
- wherein the main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with the target liquid within the cavity.
A pH measuring method, comprising:
- flowing a target liquid toward a cavity from a supply line in a pH measuring device;
- and
- measuring a pH of the target liquid by a pH sensor which is in contact with the target liquid within the cavity,
- wherein the pH measuring device comprises a main body block having an integral structure, and
- the main body block comprises the cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line, and the main body block is configured to support the pH sensor such that the pH sensor is in contact with the target liquid within the cavity.
2 more elements
Dependencies are inferred from the claim text.