Capacitive sensor for photoacoustic spectroscopy, device and method using such a sensor
AssigneesUniversite De Montpellier, Centre National De La Recherche Scientifique
InventorsAurore VICET, Kaim CHAMASSI, Michaël BAHRIZ
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Abstract
A sensor for photoacoustic spectroscopy including a support and a mechanical resonator fastened to the support, including at least one sensor element designed to be vibrated by an acoustic wave, and at least one first capacitive electrode mechanically coupled to the sensor element so as to be moved by the sensor element when it is vibrated; and at least one second capacitive electrode forming with the at least one first electrode, a capacitive sensor; the support facing the sensor element, an apertured part formed by one or more through-openings. Also provided is a detection and/or measurement device and method, for photoacoustic spectroscopy, using such a sensor.
Claims16
A sensor for photoacoustic spectroscopy comprising:
- a support;
- a mechanical resonator, fastened to said support, and including:
- at least one sensor element intended to be vibrated by an acoustic wave, and
- at least one first capacitive electrode, mechanically coupled to said sensor element, so as to be moved by said sensor element when it is vibrated;
- at least one second capacitive electrode forming, with said at least one first electrode, a capacitive sensor;
- and
- said support has, opposite said sensor element, a perforated part formed by one or more through holes.
Dependencies are inferred from the claim text.