Flow rate sensor device
AssigneeKoa Corporation
InventorYasuyuki KATASE
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Abstract
It is an object to provide a flow rate sensor device having improved sensor responsiveness compared with the prior art. The present invention is a flow rate sensor device (1) including a sensor element (3, 4) that detects a flow rate, wherein a sensor unit (10) on which the sensor element (3, 4) is mounted and a drive substrate (11) including a drive control circuit are connected through a connection portion (12) narrower than a width of the drive substrate (11). Thus, a heat source in the drive substrate (11) and a heat source in the sensor unit (10) can be separated by the connection portion (12) that is thin in width, and the thermal influence from the drive substrate (11) to the sensor unit (10) can be suppressed. Therefore, good sensor responsiveness can be maintained.
Claims6
A flow rate sensor device comprising a sensor element that detects a flow rate,
- wherein a sensor unit on which the sensor element is mounted and a drive substrate including a drive control circuit are connected through a connection portion narrower than a width of the drive substrate.
Dependencies are inferred from the claim text.