Measurement of thickness of thermal barrier coatings using 3d imaging and surface subtraction methods for objects with complex geometries
AssigneeApplied Materials, Inc.
InventorsKamala Chakravarthy RAGHAVAN, David Alexander BRITZ
Life of this patent
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Abstract
Embodiments described herein relate to a non-destructive measurement device measurement device and a non-destructive measurement method for determining coating thickness of a three-dimensional (3D) object. In one embodiment, at least one first 3D image of an uncoated surface of the object and at least one second 3D image of a coated surface of the object are collected and analyzed to the determine the coating thickness of the object.
Claims16
A method of determining a thickness of an object coating, comprising:
- positioning a surface of an object in a field view of the at least one image sensor system in a non-destructive measurement device, the object having one or more surfaces;
- reading a Quick Response (QR) code corresponding to at least one part coordinate or an alignment position of the surface in the non-destructive measurement device, the QR code disposed on the object:
- collecting a 3D image of the surface without chemically or physically changing the one or more surfaces of the object corresponding to the at least one part coordinate or the aligned surface of the object at the alignment position;
- and
- analyzing the 3D.
9-14. (canceled)
A non-destructive measurement device, comprising:
- a body;
- a stage assembly disposed in the body, the stage assembly comprising:
- a stage configured to retain an object;
- and
- a coordinate grid;
- an image sensor assembly disposed in the body, the image sensor assembly comprising:
- one or more image sensor systems, each of the one or more image sensor systems having an illumination unit, one or more image sensors, and a Quick Response (QR) code reader;
- and
- a controller coupled to the stage assembly and the image sensor assembly, the controller interfaced with a coating system and controlling automation integration with the coating system via a system controller of the coating system, the controller configured to:
- instruct the one or more image sensor systems to determine a z-axis position of at least one part coordinate of a predetermined number of surfaces of the object corresponding to a QR code of the object;
- instruct the one or more image sensor systems to collect one or more 3D images of the predetermined number of surfaces of the object without chemically or physically changing the predetermined number of surfaces of the object corresponding to the at least one part coordinate or an aligned surface of the object at an alignment position;
- and
- analyze the one or more 3D images to obtain a thickness of a coating of the object.
A non-destructive measurement device, comprising:
- a body;
- a stage assembly disposed in the body, the stage assembly comprising:
- a stage configured to retain an object;
- a track disposed in the body and around the stage;
- one or more image sensor systems coupled to the track, each of the one or more image sensor systems having an actuator operable to move the one or more image sensor systems along the track around a circumference of the stage;
- and
- a controller coupled to the stage assembly and the one or more image sensor systems, the controller configured to:
- instruct the one or more image sensor systems to collect one or more 3D images of a predetermined number of surfaces of the object without chemically or physically changing the predetermined number of surfaces of the object.
Dependencies are inferred from the claim text.