Cryopump and cryocooler vibration isolation structure

A cryocooler vibration isolation structure comprising:

• a first flange;
• a second flange airtightly connected to the first flange;
• and
• an annular laminated vibration isolation body in which a first annular vibration isolation material, a first annular support member, an intermediate annular vibration isolation material, a second annular support member, and a second annular vibration isolation material are disposed in this order from the first flange toward the second flange,
• wherein the second annular support member and the first annular support member are fixed to the first flange and the second flange, respectively, such that the first flange and the second annular support member are vibration-isolated from the second flange and the first annular support member.

A cryocooler vibration isolation structure comprising:

• a first flange;
• a second flange airtightly connected to the first flange;
• a laminated vibration isolation body in which a first vibration isolation material, a first support member, an intermediate vibration isolation material, a second support member, and a second vibration isolation material are disposed in this order from the first flange toward the second flange;
• a first fixing member that fixes the second support member to the first flange, the first fixing member forming a first support structure for supporting the first vibration isolation material and the intermediate vibration isolation material, together with the first flange and the second support member;
• and
• a second fixing member that fixes the first support member to the second flange, the second fixing member forming a second support structure for supporting the intermediate vibration isolation material and the second vibration isolation material, together with the second flange and the first support member,
• wherein the first support structure and the second support structure are vibration-isolated from each other by the first vibration isolation material, the intermediate vibration isolation material and the second vibration isolation material.