Method for manufacturing molybdenum-containing thin film and molybdenum-containing thin film manufactured thereby
AssigneeDnf Co., Ltd.
InventorsMyong Woon KIM, Sang Ick LEE, Jang Woo SEO, Sang Yong JEON, Haeng Don LIM
Life of this patent
Estimating the term…
Abstract
The present invention provides a method for manufacturing a molybdenum-containing thin film and a molybdenum-containing thin film manufactured thereby. By using a molybdenum (0)-based hydrocarbon compound and a predetermined reaction gas, the method for manufacturing a molybdenum-containing thin film according to the present invention enables easy manufacturing of a highly pure thin film in a simple process.
Claims15
A method of manufacturing a molybdenum-containing thin film, the method comprising:
- using a molybdenum(0)-based hydrocarbon compound as a precursor for depositing a thin film, and
- using iodine, (C1-C3)alkyl iodide, iodo silane, or a mixture thereof as a reaction gas to manufacture the molybdenum-containing thin film.
A composition for depositing a molybdenum-containing thin film, the composition comprising:
- a molybdenum(0)-based hydrocarbon compound as a precursor;
- and
- iodine, (C1-C3)alkyl iodide, iodo silane, or a mixture thereof as reaction gas.
Dependencies are inferred from the claim text.