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US 2022/0018016 A1Published application
Method and system for depositing molybdenum layers
AssigneeASM IP Holding B.V.
InventorsPaul Ma, Roghayyeh Lotfi, Jaebeom Lee, Eric Christopher Stevens, Amit Mishra
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Abstract
Methods and systems for forming molybdenum layers on a surface of a substrate and structures and devices formed using the methods are disclosed. Exemplary methods include forming an underlayer prior to forming the molybdenum layer. The underlayer can be used to manipulate stress in the molybdenum layer and/or reduce a nucleation temperature and/or deposition temperature of a step of forming the molybdenum layer.
Claims20
A method of forming a structure, the method comprising the steps of:
- providing a substrate;
- forming an underlayer comprising one or more of a transition metal sulfide, a transition metal carbide, and a transition metal nitride on a surface of the substrate;
- and
- forming a molybdenum layer overlying the underlayer.
1 more element
Dependencies are inferred from the claim text.