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US 2022/0017673 A1Published application
Dielectric Film Forming Compositions
AssigneeFujifilm Electronic Materials U.S.A., Inc.
InventorsSanjay Malik, Binod B. De, William A. Reinerth, Ognian Dimov, Stephanie Dilocker
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Abstract
This disclosure relates to a dielectric film forming composition that includes a plurality of (meth)acrylate containing compounds, at least one fully imidized polyimide polymer, and at least one solvent.
Claims22
A dielectric film forming composition, comprising:
- a plurality of (meth)acrylate containing compounds, wherein the plurality of (meth)acrylate containing compounds comprise:
- at least one mono(meth)acrylate containing compound of structure (I),
- wherein R1 is a hydrogen atom, a C1-C3 alkyl group, a fully or partially halogen substituted C1-C3 alkyl group, or a halogen atom;
- R2 is a C2-C10 alkylene group, a C5-C20 cycloalkylene group, or a R4O group, wherein R4 is a linear or branched C2-C10 alkylene group or a C5-C20 cycloalkylene group;
- R3 is a substituted or unsubstituted linear, branched or cyclic C1-C10 alkyl group, a saturated or unsaturated C5-C25 alicyclic group, a C6-C18 aryl group, or a C7-C18 alkylaryl group;
- and n is 0 or 1;
- at least one di(meth)acrylate containing cross linker;
- and
- optionally at least one multi(meth)acrylate containing cross linker comprising at least 3 (meth)acrylate groups;
- at least one fully imidized polyimide polymer;
- and
- optionally, at least one solvent.
9 more elements
Dependencies are inferred from the claim text.