End effector for slab formed substrates
AssigneeAtotech Deutschland GmbH
InventorsSteffen POLLACK, Siegfried ICKERT
Life of this patent
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AssigneeAtotech Deutschland GmbH
InventorsSteffen POLLACK, Siegfried ICKERT
Estimating the term…
An end effector for clamping a slab formed substrate (2) having a rim section (5) that is arranged at least approximately and at least partially in a substrate main plane comprises at least a pressing device (10) providing at least a pressing area (11), and at least a support device (20) providing at least a support area (21). The end effector (1) is configured, in a clamped state of the substrate (2), to clamp the substrate (2) at a first surface (3) by a pressing area (11) of a pressing device (10) and at a second surface (4) that is, in regard to the first surface (3), arranged at the opposite side of the substrate (2) by a support area (21) of a support device (20). The end effector comprises a guide (15) for guiding the pressing device (10) relative to the support device (20).
End effector for clamping a slab formed substrate (2) having a rim section (5) that is arranged at least approximately and at least partially in a substrate main plane, wherein the end effector (1) comprises at least a pressing device (10) providing at least a pressing area (11), and at least a support device (20) providing at least a support area (21);
Dependencies are inferred from the claim text.