Ultrasonic Sensor
AssigneeSeiko Epson Corporation
InventorChikara KOJIMA
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Abstract
An ultrasonic sensor includes a substrate in which an opening is formed; a vibration plate that is provided on the substrate so as to block the opening; and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode that are stacked on an opposite side of the opening of the vibration plate, in which when a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked is a Z direction, and a portion that is completely overlapped by the first electrode, the piezoelectric layer, and the second electrode in the Z direction is an active portion, a plurality of active portions are provided so as to face the each opening, and a columnar member is provided between the adjacent active portions.
Claims15
An ultrasonic sensor comprising:
- a substrate having an opening;
- a vibration member provided on the substrate so as to overlap the opening in a first direction;
- and
- a first piezoelectric element including a first electrode, a first portion of a piezoelectric layer, and a second electrode that are stacked on the vibration member in the first direction,
- a second piezoelectric element including the first electrode, a second portion of the piezoelectric layer, and the second electrode that are stacked on the vibration member in the first direction,
- wherein a wall is provided between the first piezoelectric element and the second piezoelectric element, the first piezoelectric element and the opening both have a rectangular shape in a plan view,
- an aspect ratio of the opening in the substrate is greater than that of the first piezoelectric element, and the first piezoelectric element and the second piezoelectric element are provided in a longitudinal direction of the opening.
An ultrasonic sensor comprising:
- a substrate having an opening;
- a vibration member provided on the substrate so as to overlap the opening in a first direction;
- and
- a piezoelectric element is stacked on the vibration member in the first direction, the piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode stacked in the first direction,
- wherein the first electrode extends in a second direction perpendicular to the first direction,
- the second electrode has a first part and a second part, the second part being separated from the first part,
- a first portion of the piezoelectric element is overlapped by the first electrode, the piezoelectric layer, and the first part of the second electrode in the first direction inside the opening,
- a second portion of the piezoelectric element is overlapped by the first electrode, the piezoelectric layer, and the second part of the second electrode in the first direction inside the opening, and
- the first portion and the second portion are adjacent in the second direction.
Dependencies are inferred from the claim text.