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US 2022/0013540 A1Published application
Nonvolatile memory device having multiple numbers of channel layers
AssigneeSK hynix Inc.
InventorsHyangkeun YOO, Ju Ry SONG, Se Ho LEE, Jae Gil LEE
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Abstract
A nonvolatile memory device according to an embodiment includes a substrate, a channel structure extending in a direction perpendicular to the substrate; a charge storage structure disposed to be in contact with the channel structure; and a cell electrode structure disposed to be in contact with the charge storage structure in a lateral direction, wherein the channel structure comprises a hole conduction layer and an electron conduction layer.
Claims19
A nonvolatile memory device comprising:
- a substrate;
- a channel structure extending in a direction perpendicular to the substrate;
- a charge storage structure disposed to be in contact with the channel structure;
- and
- a cell electrode structure disposed to be in contact with the charge storage structure in a lateral direction,
- wherein the channel structure comprises a hole conduction layer and an electron conduction layer.
3 more elements
A nonvolatile memory device comprising:
- a substrate;
- a channel structure extending in a direction perpendicular to the substrate;
- a charge storage structure disposed to be in contact with the channel structure;
- a cell electrode structure disposed to be in contact with the charge storage structure in a lateral direction;
- a control electrode structure disposed over or below the cell electrode structure on the substrate, the control electrode structure including an interlayer dielectric layer and a control electrode layer;
- a control dielectric layer disposed to be in contact with the control electrode structure;
- and
- a control channel layer disposed adjacent to the control dielectric layer and electrically connected to the channel structure,
- wherein the channel structure comprises a hole conduction layer and an electron conduction layer.
- wherein the control channel layer is a portion of the electron conduction layer configured to extend along the control dielectric layer.
7 more elements
Dependencies are inferred from the claim text.