Substrate handling systems
AssigneeApplied Materials, Inc.
InventorsGee Sun HOEY, Balasubramaniam Coimbatore JAGANATHAN, Jagan RANGARAJAN
Life of this patent
Estimating the term…
Abstract
An apparatus for transferring a substrate is disclosed herein. More specifically, the apparatus relates to substrate handling systems used in semiconductor device manufacturing, and more particularly, to substrate handling systems having a substrate handler with enclosed moving elements and increased compatibility with post-CMP cleaning modules. The apparatus includes one or more indexing assemblies. Each of the indexing assemblies including an enclosure, an actuator assembly disposed within the enclosure, and two handling blades disposed outside of the disclosure. Each of the two blades are moveable in either of a translational or a rotating manner.
Claims20
A substrate handling system, comprising:
- an enclosure comprising an outer wall having a first opening and a second opening formed therethrough;
- an actuator assembly disposed within the enclosure;
- a first handling blade coupled to the actuator assembly through the first opening, the first handling blade comprising a first substrate handling surface disposed outside of the enclosure;
- and
- a second handling blade coupled to the actuator assembly through the second opening, the second handling blade comprising a second substrate handling surface disposed outside of the enclosure.
A substrate handling system comprising:
- a guiding beam;
- a support column coupled to the guiding beam and moveable along a first axis;
- a first rail disposed along a length of the support column and perpendicular to the first axis;
- a second rail disposed along the length of the support column and parallel to the first rail;
- a first substrate indexer assembly moveably coupled to the first rail;
- a second substrate indexer assembly moveably coupled to the second rail, wherein the first substrate indexer assembly and the second substrate indexer assembly each comprise:
- an enclosure, the enclosure comprising an outer wall with a first opening and a second opening formed therethrough;
- an actuator assembly disposed within the enclosure;
- a first handling blade coupled to the actuator assembly, the first handling blade comprising a first substrate handling surface disposed outside of the enclosure;
- and
- a second handling blade coupled to the actuator assembly, the second handling blade comprising a second substrate handling surface disposed outside of the enclosure.
A substrate handling system comprising:
- a guiding beam;
- a support column coupled to the guiding beam and moveable along a first axis;
- a first rail disposed along a length of the support column and perpendicular to the first axis;
- a second rail disposed along the length of the support column and parallel to the first rail;
- a first substrate indexer assembly moveably coupled to the first rail;
- a second substrate indexer assembly moveably coupled to the second rail;
- and
- a controller, the controller configured to:
- secure a substrate within a horizontal pre-clean module with the first substrate indexer assembly in a horizontal position;
- remove the substrate from the horizontal pre-clean module with the first substrate indexer assembly;
- swing the substrate to a vertical position after securing the substrate by pivoting the first substrate indexer assembly;
- lower the substrate into a vertical cleaning module;
- release the substrate after lowering the substrate into the vertical cleaning module;
- after releasing the substrate, secure the substrate with the second substrate indexer assembly from the vertical cleaning module;
- raise the substrate to a transfer position after securing the substrate with the second substrate indexer assembly;
- and
- move the support column in a horizontal direction along the guiding beam.
Dependencies are inferred from the claim text.