US 2022/0013388 A1 · PIN-LIFTER TEST SUBSTRATE

Abstract

Various embodiments include apparatuses to provides an in-situ, non-intrusive verification of substrate pin-lifters while a substrate is in a substrate-processing location on a process tool. The disclosed subject matter can also verify any unexpected substrate movement prior to or while the substrate is being removed from the process tool. In an exemplary embodiment, a pin-lifter test substrate includes a number of motion sensors and at least one force sensor. The motion sensors including at least one type of sensor selected from sensor types including inclinometers and accelerometers. A memory device on the pin-lifter test substrate records data received from the motion sensors. Instead of or in addition to the memory device, a wireless communications device transmits data received from the motion sensors to a remote receiver. Other apparatuses and systems are disclosed.

Claims28

Dependent claims

A pin-lifter test substrate system, comprising:

a plurality of motion sensors, the motion sensors including at least one type of sensor selected from sensor types including inclinometers and accelerometers;
one or more force sensors located in proximity to corresponding locations of a plurality of substrate pin-lifters when the pin-lifter test substrate is placed on a substrate-holding device;
a communications device configured to transmit data received from the plurality of motion sensors and the one or more force sensors;
and
a memory device communicatively coupled to the communications device and configured to record data received from the plurality of motion sensors and the one or more force sensors.

2 more elements

A substrate-processing system, comprising:

a substrate-holding device having a plurality of substrate pin-lifters;
a controller communicatively coupled to the substrate-holding device and having executable instructions configured to:
load, using an end effector of a robot, a pin-lifter test substrate onto the substrate-holding device within at least one process chamber of the substrate-processing system;
receive data from a plurality of motion sensors and a plurality of force sensors mounted on the pin-lifter test substrate, the motion sensors including at least one type of sensor selected from sensor types including inclinometers and accelerometers;
and
perform an operation including at least one type of operation selected from operations including transmitting the received data to a receiver located distal from the pin-lifter test substrate and storing the received data to a memory device mounted on the pin-lifter test substrate.

3 more elements

Dependencies are inferred from the claim text.

Pin-lifter test substrate

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Pin-lifter test substrate

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Abstract

Claims28