Backing plate, sputtering target, and production methods therefor

A joined product comprising a plate-shaped body having a groove on one side through which a fluid passes and a plate-shaped cover member disposed on the body so as to cover the groove of the body, wherein:

• the joined product has a length of 1000 mm or more;
• the body and the cover member are integrated by joining;
• the groove has at least two first parts extending in a longitudinal direction of the body;
• and a maximum distortion of a longitudinal side surface of the groove is less than 1 mm.

A joined product comprising a plate-shaped body having a groove on one side through which a fluid passes and a plate-shaped cover member disposed on the body so as to cover the groove of the body, wherein:

• a ratio of a length to a width of the joined product is 3.1 or more;
• the body and the cover member are integrated by joining;
• the groove has at least two first parts extending in a longitudinal direction of the body;
• and a maximum distortion of a longitudinal side surface of the groove is less than 1 mm.

A backing plate comprising a plate-shaped body having a groove on one side through which a fluid passes and a plate-shaped cover member disposed on the body so as to cover the groove of the body, wherein:

• the backing plate has a length of 1000 mm or more;
• the body and the cover member are integrated by joining;
• the groove has at least two first parts extending in a longitudinal direction of the body;
• and a difference between a maximum value and a minimum value of a distance from a longitudinal side surface of the body to a closest longitudinal side surface of the first part is less than 1 mm.

A backing plate comprising a plate-shaped body having a groove on one side through which a fluid passes and a plate-shaped cover member disposed on the body so as to cover the groove of the body, wherein:

• a ratio of a length to a width of the backing plate is 3.1 or more;
• the body and the cover member are integrated by joining;
• the groove has at least two first parts extending in a longitudinal direction of the body;
• and a difference between a maximum value and a minimum value of a distance from a longitudinal side surface of the body to a closest longitudinal side surface of the first part is less than 1 mm.