Plasma processing apparatus and substrate support of plasma processing apparatus
AssigneeTokyo Electron Limited
InventorMasahiro DOGOME
Life of this patent
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AssigneeTokyo Electron Limited
InventorMasahiro DOGOME
Estimating the term…
There is provided a substrate support of a plasma processing apparatus. The substrate support includes a wafer placement surface and a ring placement surface on which a first ring and a second ring disposed at an outer peripheral side of the first ring without overlapping with the first ring in a vertical direction are placed, with a hole at a boundary between the first ring and the second ring. The substrate support further includes a lifter pin having a first holding portion and a second holding portion, the second holding portion being unitary with and extending axially from a base end of the first holding portion and having a protruding portion protruding from an outer circumference of the first holding portion, and a driving mechanism configured to raise and lower the lifter pin.
A substrate support of a plasma processing apparatus, comprising:
A plasma processing apparatus comprising:
Dependencies are inferred from the claim text.