Ion current droop compensation
AssigneeEagle Harbor Technologies, Inc.
InventorsChristopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
Life of this patent
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Abstract
In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 mΩ-1.25Ω; and a snubber capacitor having a capacitance of about 2 μF-35 μF.
Claims27
A power supply system comprising:
- an RF driver that produces an RF signal with an RF frequency;
- a nanosecond pulser that produces high voltage pulses with a pulse repetition frequency that is less than the RF frequency, a pulse width, and a peak voltage greater than 2 kV, the nanosecond pulser comprising a snubber circuit including:
- a snubber resistor having a resistance of about 7.5 mΩ-1.25Ω;
- and
- a snubber capacitor having a capacitance of about 2 μF-35 μF;
- and
- a filter circuit disposed between the RF driver and the plasma chamber.
A pulse generator comprising:
- a power supply providing voltage of more than 2 kV;
- a transformer comprising:
- a transformer core;
- a primary winding wrapped around at least a portion of the transformer core, the primary winding having a first lead and a second lead;
- and
- a secondary winding wrapped around at least a portion of the transformer core;
- a droop compensation circuit electrically coupled with first lead of the primary winding;
- a first switch electrically connected with the droop compensation circuit and the power supply;
- a second switch electrically connected with the second lead of the primary winding and the power supply, wherein the first switch and the second switch are opened and closed at different time intervals;
- and
- a pulsing output electrically coupled with the secondary winding of the transformer that outputs square wave pulses.
A pulse generator comprising:
- a DC power supply providing voltage greater than 2 kV;
- a transformer comprising:
- a transformer core;
- a primary winding wrapped around at least a portion of the transformer core, the primary winding having a first lead and a second lead;
- and
- a secondary winding wrapped around at least a portion of the transformer core;
- a plurality of switches arranged in a full-bridge arrangement, a first portion of the plurality of switches electrically connected with the droop compensation circuit and the power supply;
- a second portion of the plurality of switches electrically connected with the second lead of the primary winding and the power supply, wherein the first portion of the plurality of switches and the second portion of the plurality of switches are opened and closed at different time intervals;
- a dampening circuit electrically arranged between the first portion of the plurality of switches and/or the second portion of the plurality of switches and the transformer, the dampening circuit comprising:
- a diode biased from the first portion of the plurality of switches toward to first lead;
- a first resistor arranged in between the diode and the first lead;
- a first inductor;
- and
- a second resistor arranged in series with the first inductor and electrically coupled across the diode;
- and
- a pulsing output electrically coupled with the secondary winding of the transformer that outputs pulses having a voltage greater than about 2 kV and with pulse frequencies greater than 1 kHz.
Dependencies are inferred from the claim text.