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US 2022/0012852 A1Published application
Reconstruction of a distorted image of an array of structural elements of a specimen
AssigneeApplied Materials Israel Ltd.
InventorsYehuda COHEN, Rafael BISTRITZER
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Abstract
There is provided a method and a system configured to compensate for image distortions.
Claims16
A system having image reconstruction capabilities, the system comprises a processor and memory circuitry that is configured to:
- obtain a distorted image of an array of repetitive cells of a specimen, each cell comprises one or more structural elements;
- find a first array entity of the array;
- wherein the first array entity is selected out of the first cell and a sub-cell of the first cell;
- determine a location of the first array entity at a sub-pixel resolution;
- scan the array to find, at the sub-pixel resolution, locations of other array entities;
- determining, based at least on the locations, a distortion compensation transform that once applied on the distorted image, will provide an undistorted image;
- and
- applying the distortion compensation transform on the distorted image to provide the undistorted image.
5 more elements
A method of examining a specimen, the method comprises:
- obtaining a distorted image of an array of repetitive cells of a specimen, each cell comprises one or more structural elements;
- finding a first array entity of the array and determining a location of the first array entity at a sub-pixel resolution;
- wherein the first array entity is selected out of the first cell and a sub-cell of the first cell;
- scanning the array to find, at the sub-pixel resolution, locations of other array entities;
- determining, based at least on the locations, a distortion compensation transform that once applied on the distorted image, will provide an undistorted image;
- and
- applying the distortion compensation transform on the distorted image to provide the undistorted image.
4 more elements
A non-transitory computer readable medium comprising instructions that, when executed by a processor and memory circuitry, cause the processor and memory circuitry to perform operations comprising:
- obtaining a distorted image of an array of repetitive cells of a specimen, each cell comprises one or more structural elements;
- finding a first array entity of the array and determining a location of the first array entity at a sub-pixel resolution;
- wherein the first array entity is selected out of the first cell and a sub-cell of the first cell;
- scanning the array to find, at the sub-pixel resolution, locations of other array entities;
- determining, based at least on the locations, a distortion compensation transform that once applied on the distorted image, will provide an undistorted image;
- and
- applying the distortion compensation transform on the distorted image to provide the undistorted image.
4 more elements
Dependencies are inferred from the claim text.