Method of manufacturing semiconductor device and system for same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKe-Ying SU, Ze-Ming WU, Po-Jui LIN
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKe-Ying SU, Ze-Ming WU, Po-Jui LIN
Estimating the term…
A method is disclosed for storing and reusing the PC description of layout cells. A database stores predefined cells and PC descriptions that were previously calculated by a 3D field solver. Regarding a candidate cell from the layout diagram, the database is searched for a substantial match amongst the predefined cells. . If there is a match, then the stored PC description of the matching predefined cell is assigned to the candidate cell in the layout diagram, which avoids having to make a discrete calculation for the PC description. If there is no match, then the 3D field solver is applied to the candidate cell in order to calculate the PC description of the candidate cell. To facilitate reusing the newly calculated PC description, the candidate cell and the newly calculated PC description are stored in the database as a new predefined cell and its corresponding PC description.
A method of manufacturing a semiconductor device, a corresponding layout diagram being stored on a non-transitory computer-readable medium, the layout diagram including layout cells, the method comprising generating the layout diagram including:
The method of claim 7, further comprising:
A non-transitory computer-readable medium having stored thereon computer executable instructions representing a method of generating a layout diagram, the layout diagram including layout cells which are organized into layout groups, each layout group including a central cell and a set of one or more of the cells which are adjacent to the central cell (adjacent cells), the computer executable instructions being executable by at least one processor to perform the method comprising generating the layout diagram including:
A system for manufacturing a semiconductor device, the system comprising:
Dependencies are inferred from the claim text.