Laser Machine Automatic Operating Method and System
AssigneeChangxin Memory Technologies, Inc.
InventorYubin LU
Life of this patent
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Abstract
The present application provides laser machine automatic operating method and system, which method comprises: basing on feature information to judge whether a wafer has completed operation on a laser machine, if yes, skipping over the laser machine to perform the next procedure, if not, executing step; processing the wafer on the laser machine, wherein the laser machine generates record information, and the record information is related to operation information of the wafer on the laser machine; and acquiring the record information, and basing on the record information to generate feature information, the feature information serving as judging criteria in step.
Claims15
A laser machine automatic operating method, comprising:
- (a) basing on feature information to judge whether a wafer has completed operation on a laser machine, if yes, skipping over the laser machine to perform the next procedure, if not, executing step (b);
- (b) processing the wafer on the laser machine, wherein the laser machine generates record information, and the record information is related to operation information of the wafer on the laser machine;
- and
- (c) acquiring the record information, and basing on the record information to generate feature information, the feature information serving as judging criteria in step (a).
A laser machine automatic operating system, comprising:
- a laser machine, for laser-processing a wafer and capable of creating record information that is related to operation information of the wafer on the laser machine;
- and
- a control system, for acquiring the record information from the laser machine, basing on the record information to generate feature information, basing on the feature information to judge whether the wafer has performed operation on the laser machine, and generating a control instruction.
Dependencies are inferred from the claim text.