Hollow-core photonic crystal fiber based optical component for broadband radiation generation
AssigneeASML Netherlands B.V.
InventorsPatrick Sebastian UEBEL, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz
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Abstract
Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
Claims20
An optical component, being configured to function as an optical frequency converter in a broadband radiation source device, comprising:
- a gas cell;
- and
- a hollow-core photonic crystal fiber at least partially enclosed within the gas cell, and
- wherein the gas cell comprises filling elements configured to reduce a local cavity volume of the optical component.
Dependencies are inferred from the claim text.