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US 2022/0011640 A1Published application
Tunable grating couplers containing a material with a variable refractive index
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
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Abstract
Structures including a grating coupler and methods of forming a structure that includes a grating coupler. The grating coupler includes segments that are positioned with a spaced relationship on a slab layer. The segments contain an active material configured to have a first state with a first refractive index and a second state with a second refractive index in response to an applied stimulus. The first and second states may be produced by applying different sets of bias voltages to the segments as the applied stimulus.
Claims20
A structure comprising:
- a slab layer;
- and
- a grating coupler including a plurality of segments positioned with a spaced relationship on the slab layer, the plurality of segments comprised of an active material configured to have a first state with a first refractive index and a second state with a second refractive index in response to an applied stimulus.
A method comprising:
- forming a slab layer;
- and
- forming a grating coupler including a plurality of segments positioned with a spaced relationship on the slab layer,
- wherein the plurality of segments are comprised of an active material configured to have a first state with a first refractive index and a second state with a second refractive index in response to an applied stimulus.
1 more element
Dependencies are inferred from the claim text.