Inorganic alignment film forming apparatus for lcos display

Abstract

The present invention relates to an inorganic alignment film forming apparatus for forming an inorganic alignment film on a substrate, the apparatus comprising: a sputtering means; and an ion beam irradiation means for performing surface treatment on an inorganic alignment film formed by the sputtering means, wherein the sputtering means comprises a stage on which a substrate for forming the inorganic alignment film is arranged, at least one sputtering gun, and a sputtering mask arranged between the stage and the sputtering gun, the ion beam irradiation means comprises a stage on which the substrate is arranged, an ion beam emission unit for generating ions and irradiating the substrate with ions, and an ion beam irradiation mask arranged between the stage and the ion beam emission unit, and the sputtering mask and the ion beam irradiation mask have a plurality of inclined opening parts.

Dependencies are inferred from the claim text.