Electric optical device, electronic device, and manufacturing method of electric optical device
AssigneeSeiko Epson Corporation
InventorSatoshi ITO
Life of this patent
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Abstract
A liquid crystal device includes, on a first base material, pixels and a capacitive element disposed in a light shielding region between the pixels, and the capacitive element includes a first capacitive wiring disposed along the light shielding region, a dielectric layer that covers at least consecutive three surfaces (a surface O, a surface P and a surface Q) of the first capacitive wiring, and a second capacitive wiring that faces at least the consecutive three surfaces of the first capacitive wiring through the dielectric layer.
Claims8
An electric optical device comprising, at a substrate, a pixel and a capacitive element disposed in a light shielding region between the pixel and another pixel adjacent to the pixel,
- wherein the capacitive element includes:
- a first capacitive electrode disposed along the light shielding region;
- a capacitive insulation layer configured to cover at least consecutive three surfaces of the first capacitive electrode;
- and
- a second capacitive electrode configured to face the three surfaces of the first capacitive electrode through the capacitive insulation layer.
A manufacturing method of an electric optical device comprising:
- forming a first wiring at a substrate;
- sequentially forming an interlayer insulation layer, a stopper layer and a sacrificial layer at the substrate and the first wiring;
- forming a recess in the sacrificial layer, the stopper layer, and the interlayer insulation layer such that the recess reaches the first wiring;
- forming a spacer at a side wall of the recess,
- forming a first capacitive electrode having a plug shape in the recess including the spacer;
- exposing a part of the first capacitive electrode by removing a part of the spacer and the sacrificial layer by using the stopper layer;
- sequentially forming a capacitive insulation layer and a second capacitive electrode in such a manner as to cover at least consecutive three surfaces of the first capacitive electrode that are exposed;
- and
- forming a capacitive element by removing the second capacitive electrode, the capacitive insulation layer, and the stopper layer so that the capacitive element has substantially the same width as a width of the first wiring.
Dependencies are inferred from the claim text.