Scanning light measuring apparatus
AssigneeToshiba Tec Kabushiki Kaisha
InventorMiki Ito
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AssigneeToshiba Tec Kabushiki Kaisha
InventorMiki Ito
Estimating the term…
According to one embodiment, a scanning light measuring apparatus includes a support table, a light-emission control circuit, a light-receiving element, a moving mechanism, and a measurement control circuit. An optical unit is placed on the support table. The optical unit has a synchronous detection sensor that forms scanning light and detects the scanning light. The light-emission control circuit controls the light-emission time of the scanning light. The light-receiving element receives the scanning light. The moving mechanism supports the light-receiving element so as to be movable in a main scanning direction and a rotation direction around an axis orthogonal to the main scanning direction and an optical axis direction of the scanning light. The measurement control circuit moves the light-receiving element in the main scanning direction by the moving mechanism, scans the light-receiving element with the scanning light, acquires an output of the light-receiving element, and measures a scanning light diameter.
A scanning light measuring apparatus for observing light scanned in a main scanning direction with controllable light-emission time and scanning speed by an optical unit having a synchronous detection sensor that detects the light, the apparatus comprising:
A scanning light measuring method for observing light scanned in a main scanning direction with controllable light-emission time and scanning speed by an optical unit having a synchronous detection sensor that detects the light, the method comprising:
Dependencies are inferred from the claim text.