Mems micromirror device enveloped in a package having a transparent surface and having a tiltable platform

A MEMS micromirror device, comprising:

• a package comprising a containment body and a transparent lid, wherein the package is shaped so as to define a cavity;
• a tiltable platform disposed within in the cavity and having a reflecting surface;
• and
• a metastructure formed on the package and including a plurality of diffractive optical elements;
• wherein the plurality of diffractive optical elements are formed by columns having an area extending in a plane, the plurality of diffractive optical elements being arranged with a variable density linearly variable in a variability direction belonging to the plane.

A MEMS micromirror device, comprising:

• a package including a containment body and a lid transparent to light radiation, the package forming a cavity;
• and
• a tiltable platform housed in the cavity and having a reflecting surface;
• and
• an optical waveguide having an input end that faces outside the cavity and is configured to be optically connected to a light source, and an output end that faces the cavity, the optical waveguide being configured to receive through the input end the light radiation emitted by the light source and to guide the light radiation toward the reflecting surface.