Photonic device and fabrication method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSui-Ying HSU, Yueh-Ying LEE, Chien-Ying WU, Chen-Hao HUANG, Chien-Chang LEE, Chia-Ping LAI
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Abstract
A method for fabricating a photonic device is provided. The method includes forming an optical coupler and a waveguide structure connected to the optical coupler over a semiconductor substrate; forming a metal-dielectric stack over the optical coupler and the waveguide structure; etching a hole in the metal-dielectric stack and vertically overlapping the optical coupler; and forming a protection layer on a sidewall and a bottom of the hole.
Claims20
A method for fabricating a photonic device, comprising:
- forming an optical coupler and a waveguide structure connected to the optical coupler over a semiconductor substrate;
- forming a metal-dielectric stack over the optical coupler and the waveguide structure;
- etching a hole in the metal-dielectric stack and vertically overlapping the optical coupler;
- and
- forming a protection layer on a sidewall and a bottom of the hole.
A method for fabricating a photonic device, comprising:
- forming an optical coupler and a waveguide structure connected to the optical coupler over a semiconductor substrate;
- forming a first dielectric layer over the optical coupler and the waveguide structure;
- forming an etch stop layer over the first dielectric layer;
- forming a second dielectric layer over the etch stop layer;
- etching a hole in at least the etch stop layer and the second dielectric layer above the optical coupler, such that a sidewall of the etch stop layer and a sidewall of the second dielectric layer are exposed by the hole;
- and
- forming a protection layer on the exposed sidewall of the etch stop layer and the exposed sidewall of the second dielectric layer.
A photonic device, comprising:
- an optical coupler;
- a waveguide structure connected to the optical coupler;
- a metal-dielectric stack over the optical coupler and the waveguide structure, wherein the metal-dielectric stack has a hole above the optical coupler;
- and
- a protection layer having a first portion over a sidewall of the hole.
Dependencies are inferred from the claim text.