Triaxial industrial accelerometer

An industrial accelerometer capable of providing measurements along three measurement axes of a rectangular trihedron in particular for the vibration monitoring of an industrial machine, the accelerometer comprising:

• a first and a second microelectromechanical integrated circuit arranged on a planar printed circuit;
• the first integrated circuit extending along a first plane and constituting a first triaxial sensor capable of supplying acceleration signals along the three measurement axes, two measurement axes residing in the first plane;
• the second integrated circuit extending along a second plane and constituting a second monoaxial sensor capable of supplying an acceleration signal along a single measurement axis residing in the second plane;
• and
• the first and the second integrated circuit being arranged on the planar printed circuit so that the single measurement axis of the second sensor is parallel to one of the two measurement axes residing in the first plane of the first sensor, the other two axes being designated as the preserved axes, the measurements provided by the industrial accelerometer being composed of the acceleration signal from the second sensor and the two acceleration signals along the two preserved axes of the first sensor.