Apparatus for supplying gas

An apparatus for supplying gas, comprising:

• an ion chamber;
• and
• a gas supply unit connected to the ion chamber,
• wherein the gas supply unit comprises:
• a case having an internal space;
• an inactive gas supply unit connected to the ion chamber;
• and
• a hydrogen gas supply unit connected to a hydrogen gas supply pipe connected to the ion chamber and comprising a hydrogen gas generator generating hydrogen through a chemical reaction between a reactant and a hydrogen-containing solid raw material.

A method for operating an apparatus for supplying gas, comprising:

• installing a hydrogen generator;
• opening a third valve of a plurality of valves and a fourth valve of the plurality of valves inside a case and closing remaining valves of the plurality of valves;
• removing inactive gas from a hydrogen gas supply pipe and a first connection pipe;
• and
• running a pump for hydrogen gas while closing the fourth valve and maintaining the third valve in an open state.