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US 2022/0009770 A1Published application
Mems device with a diaphragm having a net compressive stress
AssigneeKnowles Electronics, LLC
InventorPeter V. Loeppert
Life of this patent
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Abstract
An implementation of a MEMS device includes a constrained diaphragm comprising a surface, the diaphragm having a net compressive stress; and a backplate comprising a surface facing the surface of the diaphragm, the surface of the backplate having a center, and a post extending from the surface of the backplate, wherein the post is located at or near a center of the surface and limits a maximum deflection of the diaphragm.
Claims14
A micro-electromechanical system (MEMS) device comprising:
- a constrained diaphragm comprising a surface, the diaphragm having a net compressive stress;
- and
- a backplate comprising
- a surface facing the surface of the diaphragm, the surface of the backplate having a center;
- a post extending from the surface of the backplate, wherein the post is located at or near the center, wherein the post limits a maximum deflection of the diaphragm.
2 more elements
A micro-electromechanical system (MEMS) device comprising:
- a constrained diaphragm comprising a surface, wherein the diaphragm has a net compressive stress;
- and
- a backplate comprising
- a surface facing the surface of the diaphragm,
- a post extending from the surface of the backplate, wherein the post is disposed at or near an unconstrained maximum deflection point of the diaphragm so as to limit an actual maximum deflection of the diaphragm during operation of the MEMS device.
2 more elements
A microphone comprising:
- a micro-electromechanical system (MEMS) device comprising:
- a constrained diaphragm comprising a surface, wherein the diaphragm has a net compressive stress;
- and
- a backplate comprising
- a surface facing the surface of the diaphragm,
- a post extending from the surface of the backplate, wherein the post is disposed at or near a centroid of the diaphragm and the backplate;
- and
- an integrated circuit electrically connected to the MEMS device.
5 more elements
Dependencies are inferred from the claim text.