Sound producing package structure and manufacturing method thereof
AssigneexMEMS Labs, Inc.
InventorsChiung C. Lo, Jemm Yue Liang
Life of this patent
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Abstract
A sound producing package structure includes a plurality of chips disposed within a cavity. The chips includes a first chip and a second chip, the first chip includes a first sound producing membrane and a first actuator attached to the first sound producing membrane, and a second chip includes a second sound producing membrane and a second actuator attached to the second sound producing membrane. The first sound producing membrane and the second sound producing membrane are actuated toward a center of the cavity in a synchronous fashion so as to produce a sound pressure.
Claims20
A sound producing package structure, comprising:
- a plurality of chips, disposed within a cavity, the plurality of chips comprising:
- a first chip comprising a first sound producing membrane and a first actuator attached to the first sound producing membrane;
- and
- a second chip comprising a second sound producing membrane and a second actuator attached to the second sound producing membrane;
- wherein the first sound producing membrane and the second sound producing membrane are actuated toward a center of the cavity in a synchronous fashion so as to produce a sound pressure.
A manufacturing method of a sound producing package structure, comprising:
- providing a first wall structure;
- forming a first chip on the first wall structure, wherein the first chip comprises a first sound producing membrane and a first actuator attached to the first sound producing membrane;
- forming a second chip on the first wall structure, wherein the second chip comprises a second sound producing membrane and a second actuator attached to the second sound producing membrane;
- and
- forming a second wall structure on the first wall structure;
- wherein a cavity exists between the first wall structure and the second wall structure, the first chip and the second chip are disposed within the cavity, and the first sound producing membrane and the second sound producing membrane are actuated toward a center of the cavity in a synchronous fashion so as to produce a sound pressure.
Dependencies are inferred from the claim text.