Vacuum processing apparatus and method of controlling vacuum processing apparatus

The vacuum processing apparatus of claim 7, wherein the absorption mechanism comprises:

• a plate member;
• and
• a rod member having one end rotatably and slidably connected to the bottom of the processing container and the other end rotatably and slidably connected to the plate member, the rod member being configured to suppress transfer of the deformation of the bottom of the processing container to the plate member by being rotated in a direction corresponding to the deformation of the bottom of the processing container,
• wherein the plurality of actuators are connected to the plate member.

A method of controlling a vacuum processing apparatus that comprises a processing container configured to be capable of maintaining an inside of the processing container in a vacuum atmosphere, a stage provided in the processing container and having a substrate placed on the stage, a support member passing through a hole in a bottom of the processing container to support the stage from a bottom side of the stage, a base member configured to be engaged with the support member located outside the processing container and move integrally with the stage, and a plurality of actuators provided in parallel with each other between the bottom of the processing container and the base member and configured to adjust a position and an inclination of the stage by moving the base member relative to the bottom of the processing container,

• wherein the method comprises:
• calculating a deviation amount when the substrate is transported by a transport mechanism as a correction amount of a position of a substrate;
• controlling the plurality of actuators such that the base member moves from a predetermined reference position by the correction amount;
• delivering the substrate between the stage moved together with the base member and the transport mechanism;
• and
• controlling the plurality of actuators such that the base member moves to the reference position after the substrate is delivered.

A method of operating a vacuum processing apparatus that comprises a processing container configured to be capable of maintaining an inside of the processing container in a vacuum atmosphere, a stage provided in the processing container and having a substrate placed on the stage, a support member passing through a hole in a bottom of the processing container to support the stage from a bottom side of the stage, a base member engaged with the support member located outside the processing container to be movable integrally with the stage, and a plurality of actuators provided in parallel with each other between the bottom of the processing container and the base member and configured to adjust a position and an inclination of the stage by moving the base member relative to the bottom of the processing container,

• wherein a through hole is formed in the stage to penetrate a placement surface of the stage and a rear surface with reference to the placement surface, and
• the vacuum processing apparatus further comprises a lifter pin slidably inserted into the through hole and having an upper end suspended from a placement surface side of the stage of the through hole and a lower end protruding from the rear surface of the stage to a bottom side of the processing container, and
• wherein the method comprises:
• controlling the plurality of actuators such that the base member moves downwards together with the stage;
• causing the upper end of the lifter pin to protrude from the placement surface of the stage by causing the lower end of the lifter pin to come into contact with a bottom side member of the processing container when the stage moves downwards;
• controlling the plurality of actuators such that the base member moves upwards together with the stage;
• and
• causing the upper end of the lifter pin to be received in the through hole at a placement surface side of the stage by causing the lower end of the lifter pin to be separated from the bottom side of the processing container when the stage moves upwards.