Laser annealing apparatus and method for manufacturing electronic device

A method for manufacturing an electronic device by using a laser annealing apparatus including,

• a laser apparatus configured to output laser light,
• an optical system configured to cause the laser light to be radiated in a form of batch radiation to a plurality of processing receiving areas arranged, out of a first direction and a second direction perpendicular to the first direction in a plane of a workpiece, along at least the second direction,
• a relative movement apparatus configured to move the workpiece and a batch radiation area relative to each other in the first direction and the second direction, the batch radiation area having an array of a plurality of radiation areas via which the laser light is radiated and which correspond to an array of the plurality of processing receiving areas on which the batch radiation is performed,
• a controller configured to control the laser apparatus and the relative movement apparatus in such a way that the batch radiation area and the workpiece are moved relative to each other, which is called scanning, in the first direction in an N-th scan area of the workpiece in N-th scanning, where N is an integer greater than or equal to one, so that the processing receiving areas arranged in a grid along the first and second directions in the N-th scan area are each irradiated with the laser light, after the N-th scanning, the batch radiation area and the workpiece are moved relative to each other in the second direction so that an area to undergo the scanning is changed to an (N+1)-th scan area, and the scanning is performed during (N+1)-th scanning on the (N+1)-th scan area of the workpiece, which is adjacent to and does not overlap with the N-th scan area,
• an energy density measuring apparatus configured to measure an energy density at, out of a first end and a second end that are opposite ends of the batch radiation area in the second direction, at least the second end, and
• an energy density adjusting apparatus configured to adjust the energy density at least at the first end out of the first end and the second end of the batch radiation area,
• the controller being configured to control the energy density adjusting apparatus based on a result of the measurement made by the energy density measuring apparatus to adjust the energy density at the first end when the (N+1)-th scanning is performed in such a way that the energy density at the first end in the (N+1)-th scan area adjacent to the second end in the N-th scan area approaches the energy density at the second end in the N-th scan area,
• the method comprising performing the scanning a plurality of times including the N-th scanning and the (N+1)-th scanning on the workpiece to anneal each of the processing receiving areas of the workpiece.