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US 2022/0008946 A1Published application
Faceplate tensioning method and apparatus to prevent droop
AssigneeApplied Materials, Inc.
InventorsYao-Hung YANG, Shantanu Rajiv GADGIL, Tanmay Pramod GURJAR, Sudhir R. GONDHALEKAR
Life of this patent
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Abstract
Embodiments of showerheads for use in a process chamber and methods of reducing drooping of a showerhead faceplate are provided herein. In some embodiments, a showerhead for use in a process chamber includes: a faceplate having a plurality of gas distribution holes disposed therethrough; and one or more cables that engage with the faceplate and configured to prestress the faceplate.
Claims20
A showerhead for use in a process chamber, comprising:
- a faceplate having a plurality of gas distribution holes disposed therethrough;
- and
- one or more cables that engage with the faceplate and configured to prestress the faceplate.
A process chamber, comprising:
- a chamber body coupled to a lid assembly to define an interior volume therein;
- a substrate support disposed in the interior volume;
- and
- a faceplate having an outer periphery that rests on the chamber body, wherein the faceplate includes a plurality of gas distribution holes extending therethrough disposed in the interior volume opposite the substrate support, wherein one or more cables are disposed proximate the outer periphery of the faceplate and configured to prestress the faceplate.
1 more element
A method of reducing drooping of a faceplate for use in a process chamber, comprising:
- applying a compressive force to the faceplate via one or more cables that engage with the faceplate proximate an outer periphery thereof.
Dependencies are inferred from the claim text.