Calibration system and drawing device
AssigneeInspec Inc.
InventorMasashi SUGAWARA
Life of this patent
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AssigneeInspec Inc.
InventorMasashi SUGAWARA
Estimating the term…
A calibration system includes: an exposure head support part that supports an exposure head so that a beam for exposure is incident on an exposure region on the substrate at the time of exposure; a sensor unit including an optical sensor; a sensor unit support part that supports the sensor unit so that, at the time of exposure, a light-receiving surface of the optical sensor is parallel to an exposure surface in the exposure region and the sensor unit support part is installed slidably relative to the exposure head support part; a movement mechanism that moves the exposure head support part and the sensor unit support part; and a control part that moves, at the time of calibration, the exposure head support part and the sensor unit support part so as to arrange the light-receiving surface at a position corresponding to the exposure surface.
A calibration system for calibrating at least one exposure head that irradiates a substrate having a long-sheet shape with a beam for exposure, the substrate being conveyed along a longitudinal direction, comprising:
A drawing device comprising:
Dependencies are inferred from the claim text.