Sequencer time leaping execution
AssigneeApplied Materials, Inc.
InventorChongyang Wang
Life of this patent
Estimating the term…
Abstract
A method includes receiving a plurality of operations in a sequence recipe. The plurality of operations are associated with processing a plurality of substrates in a substrate processing system. The method further includes identifying a plurality of completion times corresponding to the plurality of operations. Each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations. The method further includes simulating the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe. The method further includes causing, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
Claims20
A method comprising:
- receiving a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with processing a plurality of substrates in a substrate processing system;
- identifying a plurality of completion times corresponding to the plurality of operations, wherein each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations;
- simulating the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe;
- and
- causing, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to:
- receive a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with processing a plurality of substrates in a substrate processing system;
- identify a plurality of completion times corresponding to the plurality of operations, wherein each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations;
- simulate the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe;
- and
- cause, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
A system comprising:
- memory;
- and
- a processing device coupled to the memory, the processing device to:
- receive a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with processing a plurality of substrates in a substrate processing system;
- identify a plurality of completion times corresponding to the plurality of operations, wherein each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations;
- simulate the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe;
- and
- cause, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
Dependencies are inferred from the claim text.