Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installation
AssigneePfeiffer Vacuum GmbH
InventorsYannick GRENIER, Paul DECORDE
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AssigneePfeiffer Vacuum GmbH
InventorsYannick GRENIER, Paul DECORDE
Estimating the term…
A method is provided for controlling a temperature of a vacuum pump of a dry vacuum pump type subjected to variable pumping loads, the pump including a stator, a pumping stage, two shafts extending into the stage and respectively bearing a rotor to rotate synchronously in opposite directions in the stator and to drive a gas from a suction inlet to a delivery outlet, a cooling element coupled to the stator, a temperature sensor to measure a stator temperature, and a controller to control the stator temperature by the cooling element and the temperature sensor; and the method including controlling the pump temperature by the cooling element based on a temperature setpoint and a measurement of the stator temperature, and monitoring whether a value of a pumping load parameter is below a load threshold and, if so, increasing the setpoint. A vacuum pump and a system are also provided.
-10. (canceled)
A method for controlling a temperature of a vacuum pump of a dry vacuum pump type subjected to variable pumping loads,
Dependencies are inferred from the claim text.