Method for determining root causes of events of a semiconductor manufacturing process and for monitoring a semiconductor manufacturing process
AssigneeASML Netherlands B.V.
InventorsChang-Wei CHEN, Si-Han ZENG
Life of this patent
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Abstract
A user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface including: a library of control elements having at least a control element representing a task of simulation and each control element being selectable by a user; a control flow editor configured to organize the control elements into a control flow representing the control strategy; and a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.
Claims21
A user interface on a display for a hardware computer system, the user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface comprising:
- a library of control elements comprising at least a control element representing a task of simulation and each control element being selectable by a user;
- a control flow editor configured to organize the said control elements into a control flow representing the control strategy;
- and
- a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.
A non-transient computer program carrier comprising a computer program therein, the computer program, upon execution by a computer system, configured to cause the computer system to at least:
- generate a user interface on a display for a hardware computer system, the user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface comprising:
- a library of control elements comprising at least a control element representing a task of simulation and each control element being selectable by a user;
- and
- a control flow editor configured to organize the control elements into a control flow representing the control strategy;
- and
- communicate the control flow to a calculation engine configured to evaluate the control flow.
(canceled)
Dependencies are inferred from the claim text.