Imprint device, article manufacturing method, and measuring method for imprint device

An article manufacturing method using an imprint device, the imprint device including a holding mechanism configured to hold a mold, a mold shape correcting mechanism configured to modify a shape of the mold, at least one processor or circuit configured to function as:

• a mold shape measuring unit configured to measure the shape of the mold, and a determination unit configured to determine whether there is dirt on a mold holding surface of the holding mechanism or the mold based on mold modification characteristics which are measured by the mold shape measuring unit with respect to target mold modification values in the mold shape correcting mechanism, the article manufacturing method comprising:
• determining whether there is dirt using the imprint device;
• removing the dirt determined in the determining;
• forming a pattern on the substrate using the mold after the dirt is removed in the removing;
• and
• developing the substrate on which the pattern is formed in the forming.

A measuring method for an imprint device, comprising:

• correcting a mold shape by modifying a shape of the mold which is held by a holding mechanism of the imprint device;
• measuring the shape of the mold;
• and
• determining whether there is dirt on a mold holding surface of the holding mechanism or the mold based on mold modification characteristics which are measured in the measuring with respect to target mold modification values which are designated in the correcting.