Multilayer fluidic devices and methods for their fabrication
AssigneeIllumina, Inc.
InventorsJeffrey S. Fisher, John A. Moon, Bala Murali Venkatesan
Life of this patent
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Abstract
A method of making a flowcell includes bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts. The method further includes bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell. The formed flowcell includes a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.
Claims24
1-38. (canceled)
A method of making a flowcell, the method comprising:
- bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts;
- bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell;
- wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.
A method of making a flowcell, the method comprising:
- bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer;
- after bonding the first surface of the organic solid support to the surface of the first inorganic solid support, patterning the organic solid support so as to form a plurality of elongated cutouts in the organic solid support;
- bonding a surface of a second inorganic solid support to a second surface of the patterned organic solid support via a second bonding layer, so as to form the flowcell;
- wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.
A flowcell comprising:
- a first inorganic solid support;
- a second inorganic solid support;
- an organic solid support, wherein the organic solid support includes a plurality of elongated cutouts;
- a first bonding layer bonding a first surface of the organic solid support to a surface of the first inorganic solid support;
- and
- a second bonding layer bonding a surface of the second inorganic solid support to a second surface of the organic solid support;
- wherein the flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.
Dependencies are inferred from the claim text.