Compact proximity focused image sensor
AssigneeIntevac, Inc.
InventorsKenneth Costello, Kevin Roderick, Verle Aebi
Life of this patent
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Abstract
An image sensor has a photocathode window assembly, an anode assembly, and a malleable metal seal. The photocathode window assembly has a photocathode layer. The anode assembly includes a silicon substrate that has an electron sensitive surface. The malleable metal seal bonds the photocathode window assembly and the silicon substrate to each other. A vacuum gap separates the photocathode layer from the electron sensitive surface. A first electrical connection and a second electrical connection are for a voltage bias of the photocathode layer relative to the electron sensitive surface.
Claims20
A vacuum proximity focused image sensor comprising:
- a photocathode window assembly having a face with one or more raised features and a photocathode layer;
- an anode assembly comprising a silicon substrate having an electron sensitive surface;
- a malleable metal seal bonding the photocathode window assembly and the silicon substrate to each other, forming a vacuum gap that separates the photocathode layer of the photocathode window assembly and the electron sensitive surface of the silicon substrate of the anode assembly by a gap height defined by the one or more raised features of the face of the photocathode window assembly;
- a first electrical connection to the photocathode layer, for a voltage bias;
- and
- a second electrical connection to the electron sensitive surface, for the voltage bias.
A vacuum proximity focused image sensor comprising:
- a photocathode window assembly having a photocathode layer;
- an anode assembly comprising a silicon substrate having an electron sensitive surface;
- a malleable metal seal bonding the photocathode window assembly and the silicon substrate to each other, forming a vacuum gap that separates the photocathode layer of the photocathode window assembly and the electron sensitive surface of the silicon substrate of the anode assembly, the vacuum gap having a gap height defined by a thickness of the malleable metal seal;
- a first electrical connection to the photocathode layer, for a voltage bias;
- and
- a second electrical connection to the electron sensitive surface, for the voltage bias.
An image sensor comprising:
- a photocathode window assembly having a photocathode layer;
- an anode assembly comprising a silicon substrate having an electron sensitive surface;
- a malleable metal seal bonding the photocathode window assembly and the silicon substrate to each other, forming a vacuum gap that separates the photocathode layer of the photocathode window assembly and the electron sensitive surface of the silicon substrate of the anode assembly;
- a first electrical connection to the photocathode layer;
- and
- a second electrical connection to the electron sensitive surface, wherein the first electrical connection and the second electrical connection are for voltage bias of the photocathode layer and the electron sensitive surface.
Dependencies are inferred from the claim text.