Substrate support structure and method of forming the same
AssigneeYazaki Corporation
InventorsKeitaroh NOZAWA, Hidehiko Shimizu, Shinji Kawai
Life of this patent
Estimating the term…
Abstract
A substrate support structure includes: a substrate support including: a support body; and a protrusion including a base portion and a leading-end portion, the protrusion protruding from the support body; and a substrate having: a substrate body; a through hole provided at the substrate body; and a protruded portion surrounding the through hole, the protruded portion protruding from a first face of the substrate body, in which the base portion of the protrusion passes through the through hole, and the leading-end portion protrudes from the first face of the substrate body inside the protruded portion and engages with the substrate body such that the through hole is covered.
Claims5
A substrate support structure comprising:
- a substrate support including:
- a support body;
- and a protrusion including a base portion and a leading-end portion larger in outer diameter than the base portion, the protrusion protruding from the support body;
- and
- a substrate having:
- a substrate body;
- a through hole provided at the substrate body;
- and a protruded portion surrounding the through hole, the protruded portion protruding from a first face that is one face in a thickness direction of the substrate body, wherein
- the base portion of the protrusion passes through the through hole, and
- the leading-end portion of the protrusion protrudes from the first face of the substrate body inside the protruded portion and engages with the substrate body such that the through hole is covered.
A method of forming a substrate support structure, the method comprising:
- a substrate temporary fixing process of temporarily fixing a substrate having a substrate body, a through hole provided at the substrate body, and a protruded portion surrounding the through hole and protruding from a first face that is one face in a thickness direction of the substrate body, to a substrate support including a support body and a protrusion protruding from the support body such that a second face that is another face in the thickness direction of the substrate body faces the substrate support and the protrusion passes through the through hole;
- and
- a protruding leading-end forming process of deforming, by softening and then by hardening, a leading end of the protrusion protruding from the through hole due to the substrate temporary fixing process such that the leading end of the protrusion covers the through hole and fits inside the protruded portion, to fix the substrate to the substrate support.
Dependencies are inferred from the claim text.