System and method for performing three-dimensional compositional analyses

A method comprising:

• providing an atom probe tomography system comprising:
• a voltage supply device electrically connectable to a sample having a tip with a distal end;
• a position-sensitive detection device positioned adjacent to the distal end of the tip;
• and multiple laser devices comprising:
• two first laser devices aimable toward opposing first sides of the tip;
• and at least one second laser device aimable toward at least one second side of the tip;
• and
• performing a compositional analysis of the tip using the atom probe tomography system, wherein the performing of the compositional analysis of the tip comprises:
• concurrently applying different types of energy to the sample to cause evaporation of atoms from the distal end of the tip, wherein the concurrently applying of the different types of energy to the sample comprises at least:
• applying, by the voltage supply device, a bias voltage to the sample;
• applying, by the first laser devices, first laser pulses to the opposing first sides, respectively, of the tip adjacent to the distal end such that the first laser pulses are asynchronous;
• and
• applying, by the at least one second laser device, at least one second laser pulse to the at least one second side of the tip adjacent to the distal end;
• and
• receiving, by the position-sensitive detection device, atoms evaporated from the distal end of the tip.

A computer program product comprising a computer readable storage medium having program instructions embodied therewith, the program instructions being executable by a controller of an atom probe tomography system to cause the atom probe tomography system to perform a method of analyzing a tip of a sample, the method comprising:

• concurrently applying different types of energy to the sample to cause evaporation of atoms from a distal end of the tip, wherein the concurrently applying of the different types of energy to the sample comprises at least:
• applying, by a voltage supply device of the atom probe tomography system, a bias voltage to the sample;
• applying, by first laser devices of the atom probe tomography system, first laser pulses to opposing first sides of the tip adjacent to the distal end such that the first laser pulses are asynchronous;
• and
• applying, by at least one second laser device of the atom probe tomography system, at least one second laser pulse to at least one second side of the tip adjacent to the distal end;
• and
• receiving, by a position-sensitive detection device of the atom probe tomography system, atoms evaporated from the distal end of the tip;
• determining, by the position-sensitive detection device, chemical nature and original position information for the received atoms;
• and
• generating, by the position-sensitive detection device based on the chemical nature and original position information for the received atoms, a three-dimensional compositional profile for the tip.