Purification method of high-purity n-Tetrasilane
AssigneeTaiwan Speciality Chemicals Corporation
InventorsSUNG-YUEH SHIEH, TENG-CHIH LEE
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Abstract
A high-purity n-tetrasilane purification method includes: introducing a tetrasilane (Si4H10) isomeric mixture into a solidifying purification tank, cooling the tetrasilane (Si4H10) to a predetermined temperature with refrigerant in the solidifying purification tank, maintaining the predetermined temperature between the freezing temperature of the n-tetrasilane (n-Si4H10) and of the i-tetrasilane (i-Si4H10), solidifying the n-tetrasilane (n-Si4H10) in the tetrasilane (Si4H10) isomeric mixture into solid state, and vacuuming the i-tetrasilane (i-Si4H10) from the mixture for separation.
Claims8
A purification method of high-purity n-tetrasilane comprising:
- Introducing tetrasilane (Si4H10) isomeric mixture into a solidifying purification tank, cooling the tetrasilane (Si4H10) to a predetermined temperature with a refrigerant flowed through the jacket of the solidifying purification tank, maintaining the predetermined temperature between the freezing temperature of n-tetrasilane (n-Si4H10) and of i-tetrasilane (i-Si4H10) to freeze the n-tetrasilane (n-Si4H10) within the tetrasilane (Si4H10) isomeric mixture into its solid form, and vacuuming the liquid i-tetrasilane (i-Si4H10) in tetrasilane (Si4H10) isomeric mixture for separation.
Dependencies are inferred from the claim text.